Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination

碩士 === 國立臺灣大學 === 光電工程學研究所 === 94 === In this work, buried-type single-mode benzocyclobutene (BCB) channel waveguides fabricated by 248nm krypton fluorine (KrF) excimer laser for a blue laser of wavelength 473nm are first demonstrated. The ultraviolet-induced refractive index changes, measured by pr...

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Main Authors:	Kuan-Yu Chen, 陳冠宇
Other Authors:	Way-Seen Wang
Format:	Others
Language:	zh-TW
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/88066761879793360293

id	ndltd-TW-094NTU05124059
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spelling	ndltd-TW-094NTU051240592015-12-16T04:38:39Z http://ndltd.ncl.edu.tw/handle/88066761879793360293 Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination Benzocyclobutene高分子藍光光波導之研製 Kuan-Yu Chen 陳冠宇碩士國立臺灣大學光電工程學研究所 94 In this work, buried-type single-mode benzocyclobutene (BCB) channel waveguides fabricated by 248nm krypton fluorine (KrF) excimer laser for a blue laser of wavelength 473nm are first demonstrated. The ultraviolet-induced refractive index changes, measured by prism coupler and spectroscopic ellipsometer, are dependent on the number of laser shots and the pulse repetition rate. By arranging the number of laser shots and the mask width, mode sizes with different aspect ratios can be obtained. Moreover, the proposed UV illumination method is much simpler and more flexible than the conventional dry etching method. Way-Seen Wang 王維新 2006 學位論文 ; thesis 50 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立臺灣大學 === 光電工程學研究所 === 94 === In this work, buried-type single-mode benzocyclobutene (BCB) channel waveguides fabricated by 248nm krypton fluorine (KrF) excimer laser for a blue laser of wavelength 473nm are first demonstrated. The ultraviolet-induced refractive index changes, measured by prism coupler and spectroscopic ellipsometer, are dependent on the number of laser shots and the pulse repetition rate. By arranging the number of laser shots and the mask width, mode sizes with different aspect ratios can be obtained. Moreover, the proposed UV illumination method is much simpler and more flexible than the conventional dry etching method.
author2	Way-Seen Wang
author_facet	Way-Seen Wang Kuan-Yu Chen 陳冠宇
author	Kuan-Yu Chen 陳冠宇
spellingShingle	Kuan-Yu Chen 陳冠宇 Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination
author_sort	Kuan-Yu Chen
title	Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination
title_short	Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination
title_full	Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination
title_fullStr	Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination
title_full_unstemmed	Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination
title_sort	fabrication of blue-laser benzocyclobutene optical waveguide by uv illumination
publishDate	2006
url	http://ndltd.ncl.edu.tw/handle/88066761879793360293
work_keys_str_mv	AT kuanyuchen fabricationofbluelaserbenzocyclobuteneopticalwaveguidebyuvillumination AT chénguānyǔ fabricationofbluelaserbenzocyclobuteneopticalwaveguidebyuvillumination AT kuanyuchen benzocyclobutenegāofēnzilánguāngguāngbōdǎozhīyánzhì AT chénguānyǔ benzocyclobutenegāofēnzilánguāngguāngbōdǎozhīyánzhì
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Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination

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