Fabrication and Surface Treatment of Quartz Template for Photo-Curing Nanoimprint Lithography
碩士 === 國立臺灣大學 === 生物產業機電工程學研究所 === 94 === Nanoimprint lithography technology (NIL) has emerged as one of the most promising technologies for high-throughput nanoscale patterning. It consists in replicating the patterns of template fabricated by electron beam lithography and reactive ion etching, by...
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| Format: | Others |
| Language: | zh-TW |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50043462545556374696 |