A New Test Structure to Determine the Poisson''s Ratio of Thin Films Using Resonant Method
碩士 === 國立臺灣大學 === 應用力學研究所 === 94 === In this study, a novel crisscross-shaped micro test structure to characterize the Poisson''s ratio of thin film materials is proposed. In micro-electro-mechanical-system （MEMS）fabrication technology, the surface micromachining means that the deposition...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08893802107886708024 |