On-line Tuning EWMA Controllers Utilizing Neural Network Approach

碩士 === 南台科技大學 === 工業管理研究所 === 94 === In the semiconductor manufacturing, Exponentially Weighted Moving Average (EWMA) controller has been shown to be an effective feedback control system. The performance of the EWMA controller depends heavily on the weight parameter (also called “discount factor”)...

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Bibliographic Details
Main Authors: Chihhsin Tsai, 蔡志欣
Other Authors: Huey Yan
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/44695626974379291708