Study of microscopic dynamic behaviour of a precision positioning stage driven by air lubricated capstan drive

• Main Authors: Chia-Wei Kang, 康家瑋
• Other Authors: 趙崇禮
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/51010164491760963542

碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 94 === Increased accuracy and higher repeatability for precision positioning systems have recently been the main requests in areas such as ultra-precision machine tools and semiconductor technologies. In order to minimize the non-linear stick-slip effect in the system, an air lubricated slide with capstan drive has been developed and the micro-dynamic characteristic of the stage was evaluated under different aerostatic slide pressure and preload. A PID controller was employed in the closed loop control system and an optic scale with 1nm resolution was used for precision position measuring. The results showed that the rms value of the measured noise was about 10nm. With the PID controller inactivated, it was found that the rms value of the error motion reduced significantly when the preload of capstan drive got activated (from around 900nm dropped to under 20nm in the case of 3.5 kg/cm2 air slide pressure). Frequency spectrum analysis indicated that the noise was higher at 9Hz and 23Hz.