Fabrication of high sensitive and water- resistive humidity sensor by phenol formaldehyde resin and plasma treatment

• Main Authors: Hsiu-Chia Lin, 林秀珈
• Other Authors: Ko-Shao Chen
• Format: Others
• Language: en_US
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/11704602775200697202

碩士 === 大同大學 === 材料工程學系(所) === 94 === For fabricating the excellent water-resistant humidity sensitive layer, the organic humidity sensitive monomer mixed with phenol-formaldehyde resin solution was successfully prepared by spin-coating on comb-shaped electrodes. The spin-coating sensitive layers were exposed to UV-light to induce grafting and curing reaction. Mixing with the resin solution cam improve the adhesion between the polymerized film and electrode substrate. Unfortunately, it tends to solve in water because the adhesion between the copolymerized monomer and electrode substrate is poor. When we deposit hydrophobic HMDSZ (hexamethyldisilazane) plasma film onto the comb-shaped electrodes as an interface before grafting, the plasma treatment can provide the free radicals that can bond with humidity-sensitive polymer strongly by graft reaction, therefore the device has a good water resistivity. The impedance can very by 4 order between humidity of35~95%. Temperature dependence, hystersis, response time, water durability under various environments were also investigated.