The Study of AZO Transparent Conducting Thin Filmswith Nano Au Particles
碩士 === 大同大學 === 材料工程學系(所) === 94 === The goal of this study is to use sol-gel method and spin coating technique to prepare ZnO：Al (AZO) thin films and to study the influence of Al doping concentration and thermal treatment condition on the electro-optical properties of AZO thin films. Au nano partic...
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| Format: | Others |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04751240358784143418 |
| Summary: | 碩士 === 大同大學 === 材料工程學系(所) === 94 === The goal of this study is to use sol-gel method and spin coating technique
to prepare ZnO：Al (AZO) thin films and to study the influence of Al
doping concentration and thermal treatment condition on the
electro-optical properties of AZO thin films. Au nano particles were also
added in hope to improve the optical-electrical properties of AZO thin
film. Zinc acetate dihydrate was used as a starting material in this
experiment. By adding different amounts of aluminum nitrate
nonahydrate as dopant and annealing in various temperatures, a minimum
resistivity of 4.613×10-2Ω-cm was obtained for the films doped with
1.5at% Al and annealing at 750℃ in Ar. A minimum resistivity of
1.289×10-3Ω-cm was obtained for the films which was doped with 2at%
Al and contained Au nano particles and annealed at 650℃ in Ar. The
incorporation of Au particles decreased two order of the resistivity of
AZO thin films and the optical transmittance was also decreased to 50-70%.
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