The Study of AZO Transparent Conducting Thin Filmswith Nano Au Particles

• Main Authors: I-Sheng Hwang, 黃奕盛
• Other Authors: Yung-Jen Lin
• Format: Others
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/04751240358784143418

碩士 === 大同大學 === 材料工程學系(所) === 94 === The goal of this study is to use sol-gel method and spin coating technique to prepare ZnO：Al (AZO) thin films and to study the influence of Al doping concentration and thermal treatment condition on the electro-optical properties of AZO thin films. Au nano particles were also added in hope to improve the optical-electrical properties of AZO thin film. Zinc acetate dihydrate was used as a starting material in this experiment. By adding different amounts of aluminum nitrate nonahydrate as dopant and annealing in various temperatures, a minimum resistivity of 4.613×10-2Ω-cm was obtained for the films doped with 1.5at% Al and annealing at 750℃ in Ar. A minimum resistivity of 1.289×10-3Ω-cm was obtained for the films which was doped with 2at% Al and contained Au nano particles and annealed at 650℃ in Ar. The incorporation of Au particles decreased two order of the resistivity of AZO thin films and the optical transmittance was also decreased to 50-70%.