| Summary: | 碩士 === 國立雲林科技大學 === 電子與資訊工程研究所 === 94 === Carbon-based materials for electron sources are of great interest due to their low threshold emission fields. These materials include diamond, nano-diamond, amorphous diamond, carbon nanofibers, tetrahedral amorphous carbon (ta-C) films, and random or oriented carbon nanotubes (CNTs). The field emission characteristics of carbon-based materials had been studied extensively, but their gas sensing characteristics deny practical applications. In this dissertation, the different electron field emission characteristics of nanodiamond film deposited onto Si substrate with low work function by a microwave plasma-chemical vapor deposition (MPCVD) reactor will be discussed. Furthermore, the different qualities of nanodiamond films will apply in gas sensing, and utilized there breakdown field to compare the influence on the sensitivity of gas sensing.
It was found that field emission properties of nanodiamond film were relative to the thickness of nanodiamond film. It was suggested that good field emission performance proportional to the ratio of ID/IG. It was concluded that the nanodiamond field emitters would be the good candidate to fabricate gas sensor devices with good performance of field emission properties.
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