Fabrication of Photonic Crystal with Resonant Cavity on SOI wafer

• Main Authors: Ting-wei Chiang, 江廷尉
• Other Authors: Chia-chen Hsu
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/41471515173579339443

碩士 === 國立中正大學 === 光機電整合工程所 === 95 === In this thesis, we utilized the finite different time domain (FDTD) and planer wave expansion (PWE) methods to simulate the band gap properties and structures of photonic crystals. By this two simulation methods, we can obtain the resonance defect modes in optical communication wavelength. In the fabrication process, we use e-beam lithography technique to do the triangle air-hole 2D photonic crystals with defects on electro-resist that agreed with the simulation results. And then use reactive ion etching (RIE) to transfer the patterns into SOI wafer. Finally, remove silica between the silicon of SOI wafer by 3 wt-% HF. This method can suspend the silicon photonic crystal, and the refractive index contrast is become larger in the vertical direction. This 2D slab photonic crystal can be expected to match the photonic band gap properties with 3D photonic crystals.