The simulation study of shortcut effectiveness for a wafer FAB automated material handling system

• Main Authors: Wu-Huang Chang, 張武煌
• Other Authors: Wen-Yih Lee
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/02245695021299862318

碩士 === 長庚大學 === 企業管理研究所 === 95 === Due to long process and re-entrant characteristics in semiconductor wafer FAB, there exists high transportation frequentcy between process tools. Alone with improving in process technology and increasing in wafer size, Automated Material Handling System (AMHS) is necessary for a wafer FAB to avoid particle contaminations, transportation delays, wafer brokens and any possible mistakes caused by human operations. The spine configuration single loop dual rail AMHS interbay system is a popular layout design in semiconductor FAB. In order to provide more flexibility in route selection, shorten transportation distance and improve the efficiency of AMHS, setting up shortcuts in the system is an effective solution. The purpose of this study is to investigate the impacts of setting up shortcuts on spine configuration single loop dual rail interbay system. In this study, a method for developing shortcut configuration was proposed. This proposed method aimed to reduce the alternative quantities by determining one shortcut configuration alternative for each shortcut number. This study also performs simulation experiments for each nine chosen alternatives, combined from two factors: average cassette transportation rate and vehicle number. The performance indices were collected and analyzed for each situation and alternative.