The simulation study of shortcut effectiveness for a wafer FAB automated material handling system
碩士 === 長庚大學 === 企業管理研究所 === 95 === Due to long process and re-entrant characteristics in semiconductor wafer FAB, there exists high transportation frequentcy between process tools. Alone with improving in process technology and increasing in wafer size, Automated Material Handling System (AMHS) is...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02245695021299862318 |