| Summary: | 碩士 === 中華技術學院 === 機電光工程研究所碩士班 === 95 === This thesis is aimed at the analysis of the flow structures and characteristics of the piezoelectronic valveless micro-pump by the experiments with high-speed photography technology. The micro-pump was made by the CO2 laser carving and hot-press methods. The influence of the different opening, angle and area ratio of the nozzle/diffuser channel was also simulated and discussed according with experimental flowrate data to design an economic micro-pump. Flow in the nozzle/diffuser channel makes the pressure gradient. By altering the opening, angle and cross-area ratio of the nozzle/diffuser channel, experiment was conducted systematically to find the better operating conditions. It proved that the maximum flowrate 3.45 ml/min and maximum back-pressure 21.9 cm-H2O of the micro-pump was generated on the condition of the nozzle/diffuser channel angle being 16°, inlet hole and outlet hole of area cross-area ratio being 0.2, driving voltage being 120V and square-wave frequency being 70Hz.
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