| Summary: | 碩士 === 中原大學 === 化學工程研究所 === 95 === The visible-active photocatalyst thin film of AgIn5S8-ZnS was deposited on glass and ITO glass by DC/RF magnetron reactive co-sputtering. PL-fluorescence spectrum, SEM, XRD, Scanning potentiostat were used to analyze the properties and capability of the photocatalyst thin film after deposition.
The optimum parameter of deposition was sputtering power DC/RF=50/50, substrate temperature 300℃, and H2S gas ratio Φ=0.4. The energy band-gap of the thin film is 1.96 eV, and the crystal structure include AgIn5S8 and ZnS obvious by XRD. The maximum photocurrent 12.96mA/cm2 of the photocatalyst thin film, it was illuminated by the 300W Xe lamp, and exert 1V bias. In addition, as the illuminate wavelength is 420nm, and without exert any bias, there is a maximum quantum efficiency about 3.7%.
Therefore, reactive co-sputtering is a proper way to preparing the high quality, large area and well uniformity of photocatalyst thin films.
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