Dynamic Modeling and Frequency Response Characteristics of Electro-Thermal Microactuators

• Main Authors: Che-hsuan Yu, 游哲軒
• Other Authors: Chih-ching Lo
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/70924160252033984215

碩士 === 逢甲大學 === 機械工程學所 === 95 === In this thesis, we present the design, fabrication, and analysis of static and dynamic response for electro-thermal micro-actuators. Based on the electrical and thermal principles, we establish a lumped dynamic model. In the research, we first conduct static analysis through finite-element method and experiments to support the accuracy and reliability of the proposed model. Based on proposed model, the further analysis on the dynamic characteristics (frequency response) are further investigated. The proposed model is simple but effective in the design and analysis for the electro-thermal micro-actuators.