Investigation of MEMS Filter For Porous Anodic Aluminum Oxide Technology
碩士 === 和春技術學院 === 電機工程研究所 === 95 === Nano technology is that have been often brought the theme studied extensively in recent years. Because use porous anodic alumina oxide technology process to got the MEMS filter have excellence of chipper. This thesis makes out the MEMS filter of porous anodic alu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92107318176602761221 |