Study on the Technical Process of Fabricating Nano-Porous Silicon Structure Using Electro-Chemical Machining

碩士 === 崑山科技大學 === 機械工程研究所 === 95 === Recently the nano-technology was rapidly developed. The demanding needs of nano-scale materials were required more and more in the industrial. Therefore, it is important to investigate the fabrication process and method of nano-structure materials. Owing to the...

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Bibliographic Details
Main Authors: Chang Yu-Feng, 張裕峰
Other Authors: 于劍平
Format: Others
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/20181561999114883634

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