Study on the Technical Process of Fabricating Nano-Porous Silicon Structure Using Electro-Chemical Machining
碩士 === 崑山科技大學 === 機械工程研究所 === 95 === Recently the nano-technology was rapidly developed. The demanding needs of nano-scale materials were required more and more in the industrial. Therefore, it is important to investigate the fabrication process and method of nano-structure materials. Owing to the...
Main Authors: | Chang Yu-Feng, 張裕峰 |
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Other Authors: | 于劍平 |
Format: | Others |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/20181561999114883634 |
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