Design and Study of Infrared Micro-Emitter Fabricated on (111)-Oriented Silicon Wafer
碩士 === 國立高雄應用科技大學 === 光電與通訊研究所 === 95 === As a result of the good mechanical properties and the excellence of non-residual stress of single crystal silicon (c-Si), my research focused on the design of suspended c-Si microstructures on (111)-oriented silicon wafer for micro-emitter applications. In o...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78239865445061787188 |