| Summary: | 碩士 === 國立中興大學 === 化學工程學系所 === 95 === A novel approach for the fabrication of Pt nanochannels by atomic force microscopy (AFM) mechanical lithography on PMMA thin film. The resolution of this mechanical lithography technique is affected by two factors, the probe tip size and the film thickness. We chose AFM tips with the radius of curvature <10 nm. Because the nanochannels can’t be fabricated with a thick resist film, we control the thickness of PMMA film around 30 nm. We applied different engraving forces on the PMMA resist film. The minimum applied force can engrave a complete channel is 2100nN. In order to ensure a complete removal of the PMMA, all of the engraving force 2100nN was selected in our procedure. The wide and depth of nanochannels observed by AFM were about 80 nm and 30 nm, respectively. In order to apply this method to fabricate chemical sensor and biosensor. The cyclic voltammograms for different numbers of Pt nanochannels in 50mM Fe(CN)63-/4- and the potential was scanned between 0.0 and +1.0V at a scan rate of 20 mV/s. The cyclic voltammograms indicated that the response current increases with the increasing number of Pt nanochannels and the behavior was similar to perfect microelectrde. Then examine H2O2 by amperometry, the result shows that the response current increased with the increased number of Pt nanowires. We selected Pt 25-lines nanochannels for the glucose detection.
There were two kinds of immobile enzymes on 25-lines Pt nanochannels. Frist, we used electrochemical synthesis of polypyrrole and GOx performed by a cyclic voltammetry method. It was hard to control the width of polypyrrole nanowires with this method and the result was unapparent for the glucose detection. Secondly, We electrodeposited of glucose oxidase directly on the 25-lines Pt nanochannels. We got apparent current response when comparing with former method. The morphology of enzyme nanowires were investigated by AFM which around 250 nm in width and 90 nm in height.
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