Effect of annealing on wear-resistant and anti-bacterial properties of TaN-Ag nanocomposite thin films
碩士 === 國立中興大學 === 材料工程學系所 === 95 === TaN–Ag nanocomposite films were deposited by reactive co-sputtering on Si and tool steel substrates. The films were then annealed using RTA (Rapid Thermal Annealing) at 400 ℃ for 2, 4, 8 minutes respectively to induce the nucleation and growth of Ag particles in...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/78189645254169327406 |