| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 95 === This thesis in an attempt to estimate the spread of errors of the artifact, process errors and machine spatial errors is identified and compensated by using Root Sum Square (RSS) method and spatial error compensation model in micro-EDM process, respectively.
Given a batch of electrodes, a new RSS method is proposed in EDM to identify two sources of the errors: the dimensional variation of the electrodes and the process over-cut error and its variation.It is further shown that the machine position error can also be identified form the artifact. In addition, for different machine configurations, a general spatial error compensation model for three-axis machines is proposed to estimate machine spatial error .
The results of compensation were showed that the total error can be greatly reduced from +/-20μm to around +/-4μm. Therefore, this investigation provides an effective spatial error compensation technology suitable for Micro/Meso Manufacturing System.
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