Evaluating Reliance Level of a Virtual Metrology System
碩士 === 國立成功大學 === 製造工程研究所碩博士班 === 95 === This work proposes a novel method for evaluating the reliability of a virtual metrology system (VMS). The proposed method calculates a reliance index (RI) value between 0 and 1 by analyzing the process data of production equipment to determine the reliability...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95936071785570692542 |