Calibration and Error Analysis for Stroboscopic Illumination Ellipsometry
碩士 === 國立交通大學 === 光電工程系所 === 95 === Stroboscopic illumination ellipsometry is a fast imaging technique which operates by synchronizing the ultra stable short pulse to freeze the variation of Photoelastic Modulator (PEM) signal. Four specific polarization states are used to deduce the ellipsometric...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88051764939774963581 |
| Summary: | 碩士 === 國立交通大學 === 光電工程系所 === 95 === Stroboscopic illumination ellipsometry is a fast imaging technique which operates by synchronizing the ultra stable short pulse to freeze the variation of Photoelastic Modulator (PEM) signal. Four specific polarization states are used to deduce the ellipsometric parameters (Ψ,Δ) .
We postulate the main deviation of ellipsometric parameters in stroboscopic illumination ellipsometry is caused by the deviation of initial temporal phase and modulation amplitude. In this paper, we will derive a correction technique to optimize ellipsometric parameters. Finally, an optical thin film of known thickness was measured to demonstrate the reliability of this correction technique. We can eliminate errors caused by the miss positioned initial time and modulation amplitude deviation. This post flight measurement technique can eliminate all the system errors and achieve dΨ~0.03° and dΔ~0.41° in 20 microsecond.
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