Synthesis and Device Fabrication of Cu/Ni Nanocomposite for Low Power Magnetic Microactuation

• Main Authors: Yu-Wen Huang, 黃昱文
• Other Authors: Y.T. Cheng
• Format: Others
• Language: en_US
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/73172890956476609338

碩士 === 國立交通大學 === 電子工程系所 === 95 === A Cu/Ni nanocomposite film and related CMOS compatible processes using alkaline noncyanide based copper plating solution have been successfully synthesized, characterized and proposed for low power micropseaker fabrication in this paper. The SQUID (Superconducting Quantum Interference Device Magnetometer) measurement indicates that magnetic properties of Cu can be modified from diamagnetism to ferromagnetism via the incorporation of Ni superparamagnetic nanoparticles into a Cu matrix to form the Cu/Ni nanocomposite film which is plated in the bath with 2g/L Ni. Without largely sacrificing the reduction of electrical conductivity of Cu (<2%), the Ni nanocomposite material shows its potential for the fabrication of high performance magnetic microactuation due to the effective reductions of power consumption of magnetic microactuation. Experimental results show that the total power consumption of magnetic microactuation will save 9% at 1 KHz, 60dB SPL.