A Study of Thin-Film Transistors with Poly-Si Nanowire Channels Fabricated by LTPS Technology
碩士 === 國立交通大學 === 電子工程系所 === 95 === In this thesis, two low-temperature poly silicon (LTPS) technologies are adopted to fabricate TFTs with poly-Si nanowire (NW) channels. One is solid phase crystallization (SPC), where gate-induced drain leakage (GIDL) is found to be the most dominant leakage mecha...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28933267786281162001 |