A Newly 3-D Embedded MEMS Structure And Its Application
碩士 === 國立交通大學 === 電信工程系所 === 95 === A novel embedded three dimensional (3-D) RF-MEMS devices and the related fabrication technology were shown in this thesis. The silicon deep etching and metallization technology were utilized to form a newly micromachined coplanar-waveguide (CPW) structure. In thes...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/hze53b |