Experimental Study of UV Emission of a Vacuum Ultra Violet Excimer Lamp

• Main Authors: Yu-Ning Chen, 陳又寧
• Other Authors: Jong-Shinn Wu
• Format: Others
• Language: en_US
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/70767890305157499517

碩士 === 國立交通大學 === 機械工程系所 === 95 === Dielectric barrier discharge (DBD) has developed for a long time, and has widely application in many fields. Among them, the excimer lamp attracts goodliness attention in recent years due to its widely application in industry, for example, new materials processing, photochemistry, fluorescent lamp and plasma display panels. In order to deal with more and more application, to promote light intensity of 172 nm becomes a questing goal. In this experiment, we discuss the effect of mixture fraction on light intensity by means of put in pure Xe and rare gas mixture. And to adjust gas total pressure, frequency and input power to observe the change of light intensity. Finally, we can realize the relation between the factors and the light intensity, and obtain the optimized operating conditions.