Optimization of Gas Monitoring System Design ~ Wafer Fabrication as an Example

• Main Authors: Kuo-Ting Peng, 彭國庭
• Other Authors: Chun-Sung Chen
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/49025149649759154468

碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災學程 === 95 === Most of the gases used in the manufacturing process in a semiconductor plant are toxic, highly corrosive or highly flammable; therefore, once they are leaked without warning, they might cause extreme treat to the safety of the personnel working in the production site. Gas monitoring system thus plays an important role in the semiconductor plant and it can signal abnormal gas leak and provide information for the supervisor for further processing. In this study, the series control functional design for the gas monitoring system in the semiconductor plant will be investigated and the result will be used as the emergency treatment references when toxic gas is leaked or when earthquake occurs in the plant. The in-plant gas detection and monitoring system design will be integrated based on gas characteristic as well as process equipment allocation in the plant. Moreover, monitoring system will be connected through Ethernet to perform related data collection and signal transfer; in the mean time, the alarm design process will be integrated and verified with its validity and related corrected suggestions will be provided. After 921 Earthquake occurred in Taiwan a few years ago, insurance company starts to impose strict requirements on the safety design and risk management of high tech plant, this is especially true for wafer foundry plant and optoelectronic plant because the investment on such plants is usually over tens of billions of New Taiwan Dollars. Therefore, once accident occurs, it not only affects national economy but also might cause great danger to industrial safety and to the environment; we hope that, through the series control functional design in the gas monitoring system, the double effect of factory safety warranty and cost saving can be achieved.