Design and Implmentation of Drive Amplifiers for Piezoelectric Positioning

• Main Authors: Yan-Ting Chen, 陳彥廷
• Other Authors: Hsin-Jang Shieh
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/5gu5bf

碩士 === 國立東華大學 === 電機工程學系 === 95 === This thesis presents the implement of drive amplifiers for piezoelectric positioning stage. In the drive amplifier design, a high voltage-type operational amplifier and an analog compensation circuit are cascaded to improve the relative stability, phase margin, and bandwidth.Because piezoelectric positioning stage is mainly characterized by the capacitive behavior, its displacement is proportional to the electric charge of capacitor. According to the equivalent circuit scheme of resistance and capacitance, a dynamic feedback circuit is proposed to increase speed of the charging and discharging capacitor. Moreover, the transient response of piezoelectric positioning stage can be improved by a dynamic feedback circuit. To identify the unknown parameters used in the drive amplifier, we adopt the method of frequency compensation. Then, simulation and experimental results are to validate the dynamic feedback circuit. In order to improve the transient response of piezoelectric positioning stage, we develop on phase lag-lead compensator plus the digital proportional-integral(PI) controller for drivers. Finally, the effectiveness of the proposed drive amplifiers is demonstrated by experimental results.