Using PIC Method To Predict Transport Processes Near A Surface In Contact With Plasma In Electromagnetic Field
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 95 === This study uses the PIC (Particle-in-cell) method to simulate unsteady three-dimensional dynamics of particles in argon plasma under low pressure, high density, and weak ionization between two planar electrodes subject to a sudden biased voltage. Plasma has...
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ndltd-TW-095NSYS54900732019-05-15T19:48:11Z http://ndltd.ncl.edu.tw/handle/s48k88 Using PIC Method To Predict Transport Processes Near A Surface In Contact With Plasma In Electromagnetic Field PIC方法模擬電磁場中的電漿與工件表面之輸送現象 Yueh-lin Kuo 郭岳霖 碩士 國立中山大學 機械與機電工程學系研究所 95 This study uses the PIC (Particle-in-cell) method to simulate unsteady three-dimensional dynamics of particles in argon plasma under low pressure, high density, and weak ionization between two planar electrodes subject to a sudden biased voltage. Plasma has been widely used in materials processing, film manufacturing, nuclear fusion, lamps, etc. Properties of plasmas are also becoming important area for research. This work includes elastic collisions between electrons and neutrals, ions and neutrals, and inelastic collisions resulting in ionization from impacting neutrals by electrons, and charge exchange between ions and neutrals, and Coulomb collisions between electrons and ions. The model ignores secondary electron emission, recombination between ions and electrons, and assumes uniform distribution of the neutrals having velocity of Maxwellian distribution. The computed results show the effects of elastic and inelastic collisions on the characteristics of plasma and sheath (space charge region) in front of the workpiece surface. Unsteady mass, momentum and energy transport from the bulk plasma through sheath to the workpiece is confirmatively and exploratorily studied after successful comparison between PIC prediction and experimental data has been made. Peng-Sheng Wei 魏蓬生 2007 學位論文 ; thesis 67 zh-TW |
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碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 95 === This study uses the PIC (Particle-in-cell) method to simulate unsteady three-dimensional dynamics of particles in argon plasma under low pressure, high density, and weak ionization between two planar electrodes subject to a sudden biased voltage. Plasma has been widely used in materials processing, film manufacturing, nuclear fusion, lamps, etc. Properties of plasmas are also becoming important area for research. This work includes elastic collisions between electrons and neutrals, ions and neutrals, and inelastic collisions resulting in ionization from impacting neutrals by electrons, and charge exchange between ions and neutrals, and Coulomb collisions between electrons and ions. The model ignores secondary electron emission, recombination between ions and electrons, and assumes uniform distribution of the neutrals having velocity of Maxwellian distribution. The computed results show the effects of elastic and inelastic collisions on the characteristics of plasma and sheath (space charge region) in front of the workpiece surface. Unsteady mass, momentum and energy transport from the bulk plasma through sheath to the workpiece is confirmatively and exploratorily studied after successful comparison between PIC prediction and experimental data has been made.
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author2 |
Peng-Sheng Wei |
author_facet |
Peng-Sheng Wei Yueh-lin Kuo 郭岳霖 |
author |
Yueh-lin Kuo 郭岳霖 |
spellingShingle |
Yueh-lin Kuo 郭岳霖 Using PIC Method To Predict Transport Processes Near A Surface In Contact With Plasma In Electromagnetic Field |
author_sort |
Yueh-lin Kuo |
title |
Using PIC Method To Predict Transport Processes Near A Surface In Contact With Plasma In Electromagnetic Field |
title_short |
Using PIC Method To Predict Transport Processes Near A Surface In Contact With Plasma In Electromagnetic Field |
title_full |
Using PIC Method To Predict Transport Processes Near A Surface In Contact With Plasma In Electromagnetic Field |
title_fullStr |
Using PIC Method To Predict Transport Processes Near A Surface In Contact With Plasma In Electromagnetic Field |
title_full_unstemmed |
Using PIC Method To Predict Transport Processes Near A Surface In Contact With Plasma In Electromagnetic Field |
title_sort |
using pic method to predict transport processes near a surface in contact with plasma in electromagnetic field |
publishDate |
2007 |
url |
http://ndltd.ncl.edu.tw/handle/s48k88 |
work_keys_str_mv |
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