Multi-chamber thin-film deposition for OTFT-application

• Main Authors: Hong-jhe Chen, 陳弘哲
• Other Authors: Ching-Lin Fan
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/94863789405456246182

碩士 === 國立臺灣科技大學 === 電子工程系 === 95 === In this thesis, because organic material extraordinary sensitivity to aqueous vapor and oxygen, so last encapsulation make apparent extraordinary importance Cheng, we design in succession continuing Shen accumulate, make Cheng newly in view of this, are not sending to the glove case after completing the organic material, but encapsulate directly under the environment of vacuum of the same machine platform directly, this way not only can reduce aqueous vapor and invading chance of oxygen, can also not need to use glass as and seal covering again, reduce thickness and manufacturing cost of products greatly, too because this machine for make Cheng at low temperature platform, so can spend on making and application of the forgiving base plate in the future. In the course of experiment, we make from a new one Cheng find out suitable parameter and procedure most, design various material test ways, and erect various gas pipelines, in order to make out the intact finished product, as the final purpose. Finally, after designing and testing, we not only finish the erecting of new apparatus, finish, make best foundation of parameter Cheng newly too. Finish making of component even more, with have now, make component Cheng make performance and characteristic compare, probe into feasibility of practical application its in addition, until orientation march towards by direction larger in future.