Application of Phase Interference for Measurement in Micro-and Nanometer Scale

• Main Authors: Chi-Hao Chiu, 邱吉豪
• Other Authors: Chwei-Goong Tseng
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/25njay

碩士 === 國立臺灣科技大學 === 機械工程系 === 95 === The Michelson interference system incorporating a microscope was developed to measure the step height in sub-micrometer scale. It constructs mainly not amplitude but phase portraits of micro-objects. Application of phase-shift interference for measurement in flatness is common. However, it is not easy to carry on for measuring the step height in sub-micrometer scale. Associating with the computer imaging processing system, both the Four-Frame Technique and the Modulation Interference Microscopy (MIM) were used to reconstruct the phase height of the object. The techniques and results from both methods were compared with each other. Also the results from both methods were compared with SEM (Scanning Electron Microscope) and AFM (Atomic Force Microscope). The results show the resolution of the phase-shift interference method is influenced by the diffraction effect and the Rayleigh limit is applied in lateral measurement, but in vertical measurement the resolution of this method is not bounded by the Rayleigh limit.