Application of Phase Interference for Measurement in Micro-and Nanometer Scale
碩士 === 國立臺灣科技大學 === 機械工程系 === 95 === The Michelson interference system incorporating a microscope was developed to measure the step height in sub-micrometer scale. It constructs mainly not amplitude but phase portraits of micro-objects. Application of phase-shift interference for measurement in flat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25njay |