Inprovement of the Shifted Gas FlowMicro-Pressure Sensor Dased on PZT Thin Films Inprovement of the Shifted Gas FlowMicro-Pressure Sensor Dased on PZT Thin Films Inprovement of the Shifted Gas Flow Micro-Pressure Sensor Dased on PZT Thin Films
碩士 === 南台科技大學 === 機械工程系 === 95 === Inprovement on Frequency- Shifted Micro-Pressure Sensor Dased on PZT Thin Films Nan- Jiang Tsai Department of Mechanical Engineering Southern Taiwan University of Technology, Tainan, Taiwan R.O.C. ABSTRACT This research consists of design, simulation and fabri...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60481869738094882522 |