MEMS Gas Sensors Using Carbon Nanotubes With Full CMOS Compatibility
碩士 === 國立臺北科技大學 === 製造科技研究所 === 95 === A class of multi-walled carbon nanotube (MWNT) gas sensors in consideration of CMOS and MEMS compatibility were proposed and developed. The sensor fabricated by CMOS-MEMS micromachining process was implemented on silicon substrate featuring a dielectric membran...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4a72gn |