Fabrication of Micro Hygrometers by Multiwalled Carbon Nanotubes
碩士 === 大同大學 === 光電工程研究所 === 95 === Fabrication of gas sensor, hygrometer and thermometer which based on carbon nanotubes (CNTs) is demonstrated. The thermally grown silicon dioxide (SiO2) on the p-type silicon wafer was used as the substrate. The sensor contains metal electrodes which were designed...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/u2ywnc |