The fabrication of silicon based porous alumina template and its application
碩士 === 國立雲林科技大學 === 光學電子工程研究所 === 95 === The porous alumina template possessed fine array could be obtained by suitable anodization condition. This study sputtered Au layer on p-type silicon wafer first, and then evaporated Al on the Au layer. The Al layer was anodized to form porous template, so-ca...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/50553180597011047153 |