Radial-Basis Function Neural Networks for LED Wafer Defect Inspection

Radial-Basis Function Neural Networks for LED Wafer Defect Inspection

碩士 === 國立雲林科技大學 === 資訊工程研究所 === 95 === Wafer defect inspection is an important process before die packaging, because a good yield ratio is key index to earn benefit in semiconductor manufacturing. Conventional wafer inspection was usually performed by human visual judgment. A large number of people...

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Bibliographic Details
Main Authors:	Yung-Chi Chang, 張詠棨
Other Authors:	Chuan-Yu Chang
Format:	Others
Language:	zh-TW
Online Access:	http://ndltd.ncl.edu.tw/handle/90410061424040891869

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