INVESTIGATION OF THE OPTICAL AND MECHANICALPROPERTIES OF METALLIC LAYER

• Main Authors: Yi-Hsiang Wang, 王奕翔
• Other Authors: 何旭川
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/54554997575590021592

碩士 === 元智大學 === 機械工程學系 === 95 === It is common in an optical system using metallic layer as reflecting mirror to change the optical path. Aluminum(Al) and Silver(Ag) have been widely used and deposited on the silica-base of substrate to form a metallic thin film. In this paper the metallic films of Al and Ag are deposited on B270 substrate by using electronic-beam vapor deposition technique. The effect of thickness on the reflectance are determined through parametric study and validated with experimental measurement. The mechanical properties and adhesive strength of the metallic film are determined by nano-indentation and attachment test, respectively. Nano-indentation tests show that the hardness of the films is dependent on the indentation depth. To protect the metallic films from dioxide, a thin film of silicon oxide SiO2 is deposited on the top of the metallic film. The effects of the substrate temperature during the depositing process on the reflectance and mechanical properties are presented.