Antireflection, Hydrophilicity and Hydrophobicity of Well-aligned Silicon Nanograss and Nanopillar

• Main Authors: Shun Po Yang, 楊舜博
• Other Authors: Sheng fa wen
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/36353389352613183205

碩士 === 中華大學 === 電機工程學系(所) === 96 === A lot of living beings in nature have self-protection functions such as antireflective moth eyes and superhydrophobic lotus leaf, which inspires us to apply them to nanomaterial technologies. We can generate a graded rough layer between air and surface to reduce reflection, and coating low-energy materials on the rough layer to increase the hydrophobicity. In general, it is very difficult to create them on one material surface. We have developed a technology to create uniform nanograss on silicon wafer by HDPCVD hydrogen plasma etching process recently. The reflection can be reduced with the increase of nanograss length. In this thesis we fabricate nanopost array first by e-beam lithography, and then create nanograss on top of it. Examined by n&k analyzer shows a downward trends in the reflection. After treated with CHF3 plasma for few seconds, the surface transferred from superhydrophilic to robust superhydrophobic state, which shows that both antireflection and superhydrophobic can be obtained simultaneously by this approach.