Fabrication of SU8 Comb-drive Microactuator by Photoresist Sacrificial Layer
碩士 === 中原大學 === 機械工程研究所 === 96 === Abstract Traditional electrostatic comb-drive structure is fabricated by microelectromechanical systems (MEMS) with silicon-based materials or metals. It depends on the surface micromachining to deposit or etch structural films. The process is not only complicate...
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64107940600450199971 |