| Summary: | 碩士 === 崑山科技大學 === 機械工程研究所 === 96 === The nano technology has been advanced continuously recent years. The micro-wearing behavior and mechanism of thin film material under micro/nano scale have discussed. The most research are discuss the properties of nano-tribology and the manufacturing process technology which sputtering on the PMMA substrate.
The properties of nano-wearing experiments are measured by NanoTest and Pin-On Disc (POD), respectively. The experimental parameters are: applied load, rotational speed and rotational radius, etc. And analyze the surface morphology under wearing behavior, to create the rule which the mechanical properties after coat film for future research.
As the experimental results, the average coefficient of friction can be separated two stages: firstly, due to the adhesion effect phenomenon occurred on the surface of metal thin film when the loading is around 1 to 5mN; second is the ploughing causing the coefficient of friction increased when the loading between 20 to 200mN. The stick-slip phenomenon occurred simultaneously under large loading, it’s the special phenomenon which due to the substrate effect when the metal film coated on the PMMA substrate.
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