The fabrication and analysis of Mo back electrode and CIS thin film of a CIS thin film solar cell
碩士 === 崑山科技大學 === 機械工程研究所 === 96 === This study is to deposit the Mo/Cu-In layer by using the vacuum Sputter and Eelectron Beam Evaporation(EBE) system, then sulfur into CuInS2 thin film. This fabrication adopts PVD method under low vacuum environment except the sulfur method under atmosphere pressu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ayhva6 |