Finite Element Analyses of Contact Stress and LIGA-like Fabrication of Rotors and Performance Test of Prototypes for a New Micro Gear Pump and a New Micro Internal Lobe Pump

• Main Authors: Jhe-Hong Wang, 王哲鴻
• Other Authors: Yaw-Hong Kang
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/35516415041004871684

碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 96 === Both of the traditional internal lobe pump with cycloid rotor and micro gear pump with involute rotor have the drawback of low volumetric efficiency. Accordingly, the goal of this thesis is to study the finite element analyses of contact stress and LIGA-like fabrication of the rotors and the performance test of the prototypes for both a new parabolic micro lobe pump and a new micro gear pump which have high volumetric efficiency. The first, how to design the profiles of rotors of two kinds of new micro gear pumps were introduced by applying the gear meshing theorem. Then, the contact stress of rotors for two kinds of new micro gear pump were simulated separately by using the finite element analyses software ANSYS/Workbench, and the von Mises stress of rotors of both micro gear pump were confirmed that smaller than the yield strength of the nickel70-cobalt30 alloy. The rotors of the new micro gear pump and the new micro lobe pump were fabricated by LIGA-like process and nickel70-cobalt30 electroforming process for the purpose of achieving the high aspect ratio mcirorotor. The profiles of fabricated rotors are measured by optical measuring microscope and E-MAX software to ensure the precision. Subsequently, the chamber and microchannel on the housings of the prototypes were fabricated on PMMA material by precision CNC machining technique. The prototypes of the new micro gear pump and the new micro lobe pump were composed by assembling the rotors, housings and the DC micromotor. Finally, the performance test of fluid transmission were experimented with various speeds of micromotor and the related data were obtained. Both of the proposed new parabolic micro lobe pump and new micro gear pump have big potential for application in some fields, such as biomedical technology, chemical processing, micro machinary, energy resources, etc.