| Summary: | 碩士 === 明道大學 === 材料暨系統工程研究所 === 96 === This study used cathode arc evaporation plasma deposition TiAlON thin film. It fixed N2 flow and tune up O2 flow to observe the colours of TiAlON. On any equipment that is used, L*a*b* control can display colours in number format to accurately compare the difference. To pigment properly, nearly hundred layers of coating are usually needed during the process to achieve the desired colours. Therefore, it is significant for the L*a*b control to attain precise colour each time during coating in order to achieve the efficiency.
With its high stability, corrosion resistance, wear ability and hardness, vacuum coating is attracting great interest in the decorative-coating industry. The object of this research is to observe the chromaticity as TiAlON thin film is developed and deposited on the brass in Cathode Arc Evaporation System. The oxygen partial pressure applied during the deposition is measured to assist investigating its effect on the phase and chromaticity of TiAlON thin film.
Through SEM, EDS, colours meter and optical microstructure, crystal experiment results are processed to analyze thin film morphology composition, microstructure and the colours chromaticity.
Results of this study showed that the brightness of thin film will change by tune up O2 flow. If increasing more O2 flow, TiAlON thin film will get more dark, and the contact angle decreasing . After corrosion test, TiAlON thin film has better corrosion resistance than TiAlN.
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