Characteristics of nano-scaled TiVCrTaZr nitride coating prepared by DC magnetron sputtering
碩士 === 國立中興大學 === 材料科學與工程學系 === 96 === Abstract In this study, the multi -element TiVCrZrTa alloy was deposited on silicon substrate via the reactive sputtering method. Several analysis methods were introduced in order to characterization the structure and properties of the TiVCrZrTa metallic and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71556294326920033859 |