Laser annealing of metallic contacts on single helical carbon nanofiber

碩士 === 國立中興大學 === 物理學系所 === 96 === In this thesis we present the experimental results on fabrication and measurement of electronic devices based on helical single-carbon nanofibers. The metal/carbon-nanofiber contacts of these devices were defined by electron beam lithography and further annealed by...

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Bibliographic Details
Main Authors: Li -Yuan Wang, 王麗媛
Other Authors: Watson Kuo
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/64518179747735024199
Description
Summary:碩士 === 國立中興大學 === 物理學系所 === 96 === In this thesis we present the experimental results on fabrication and measurement of electronic devices based on helical single-carbon nanofibers. The metal/carbon-nanofiber contacts of these devices were defined by electron beam lithography and further annealed by laser beams for reduction of contact resistances. The laser annealing has several advantages: First, the laser anneal may provides higher annealing temperatures. Second, the position of the luminous spot, which can be as small as 100