Characteristic of ZnO:Bi,Ag,Mg Thin Films by RF Magnetron Sputter
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 96 === Bismuth doped zinc oxide and silver/magnesium co-doped zinc oxide thin films on C-plane sapphire have been prepared by rf magnetron sputter system. The ceramic targets with different dopant weight and mole percentage were used. Films were post-annealed in v...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/10126622326011272100 |