The Study of On-Chip Spiral Inductors with Nickel Nanorods Core

• Main Authors: Ming-Chieh Hsu, 許名伽
• Other Authors: Yu-Ting Cheng
• Format: Others
• Language: en_US
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/62755237855941370015

碩士 === 國立交通大學 === 電子工程系所 === 96 === In this thesis, we fabricated RF spiral inductors via the incorporation of Ni nanorods, the inductance can be increased due to the relative permeability enhancement in the space. The smaller size of the inductor can reduce the wireless communication application chip area and cost down. The Ni nanorods with 70nm diameter and 1μm long were electroplated in anodic alumina oxide (AAO) template on silicon substrate. The regular Ni nanorod arrays are isolated in AAO template which can effectively avoid the eddy current loss in the layer of the magnetic materials. In this experiment, we designed two type spiral inductors with Ni nanorods core and made a study of their high frequency characteristics in non-uniform magnetic field that are induced the inductors. On-chip magnetic spiral inductors with Ni nanorod arrays core have been fabricated and characterized up to 20GHz. The 3.5 turns inductor with Ni nanorods core of inductance enhancement over the air core value is ~3% at 3GHz and until the frequency up to 6.9 GHz, the quality factor Q is 14 at 1.1GHz.