A Dual Response Surfaces Approach for Robust Wafer Parameters Design
碩士 === 國立交通大學 === 電機與控制工程系所 === 96 === The accuracy of products in every lot called yield. To improve the yield is important for the quality management of wafer fabrication. The goal of this thesis is to advance the yield. If you want to improve the yield, you have to find the parameters which affec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66060877207803522423 |